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1 article(s) from Schwartzberg, Adam M.

Electrostatically actuated encased cantilevers

Benoit X. E. Desbiolles,
Gabriela Furlan,
Adam M. Schwartzberg,
Paul D. Ashby and
Dominik Ziegler

Beilstein J. Nanotechnol. 2018, 9, 1381–1389, doi:10.3762/bjnano.9.130

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Figure 1: a) Cross section of an encased cantilever for electrostatic excitation. The electrical wiring and t...

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Figure 2: a) Amplitude (blue line) and phase (red dashed line) of the cantilever actuated using piezoacoustic...

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Figure 3: a) The amplitude increases linearly with the electrostatic drive signal (U_ac), U_dc is held constant...

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Figure 4: a) Oscillation amplitude at the resonance frequency of the cantilever induced by sub-harmonic excit...

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Figure 5: Measurement of the small downward deflection of the cantilever when varying the dc component (U_dc − ...

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Figure 6: a) Longitudinal section of a cantilever with critical dimensions. The arrows illustrate the uniform...

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Full Research Paper

Published 08 May 2018

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